ETEL TBS Linear AxisClick image to enlarge

ETEL has announced its new TBS Linear Axis offering.

The TBS Linear Axis enables semiconductor equipment manufacturers to integrate a high precision linear axis to drive higher accuracy and precision in its category of one-Degree-Of-Freedom (1-DOF) systems. With its ISO 2 rating for cleanrooms and incorporated Heidenhain Group encoder technologies, the TBS provides cleanliness and accuracy for any application needing to carry up to 45 kg of payload with high precision and stability of macro and micro motion.

The TBS 1-DOF mechanical bearing is based on an indirect drive linear axis that is controlled by a high-performance, low cogging servomotor using a dual encoder feedback control scheme.  This is combined with specific design characteristics and options such as thermal decoupling of heat sources, high stiffness and a micrometric hard stop to ensure that its performance is maintained over a long operating lifetime, improving ROI.

The TBS is especially suitable for wafer process control applications such as overlay metrology, critical dimension and thin film metrology, as well as photonics. 

Main Specifications:

  • Acceleration up to 0.5 g
  • Payload up to 45 kg
  • Position stability: down to ± 10 nm
  • Bidirectional repeatability: ± 0.3 um
  • Max. speed: up to 30 mm/s
  • Max. Acceleration: up to 5 m/s2
  • ISO 2 cleanliness (ISO 1 Optional)

ETEL S.A. is based in Switzerland with exclusive North American distribution through Heidenhain Corp.

More information here.

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